Angle	0.646 um	0.855 um	2.119 um

0.000	18.3369770	10.5309792	2.4728825
0.503	17.3982239	10.2184772	2.4624274
1.006	15.2611017	9.4259605	2.4319651
1.508	12.9295530	8.4341345	2.3839972
2.011	10.8187256	7.4369373	2.3220933
2.514	9.0222445	6.5118218	2.2501786
3.017	7.5338845	5.6851254	2.1719146
3.520	6.3146496	4.9622879	2.0903106
4.022	5.3195405	4.3376660	2.0075755
4.525	4.5071001	3.8018732	1.9252129
5.028	3.8419099	3.3440120	1.8442127
5.531	3.2948124	2.9528699	1.7652121
6.034	2.8424583	2.6179066	1.6886683
6.536	2.4662387	2.3297534	1.6148818
7.039	2.1515634	2.0808790	1.5440450
7.542	1.8870176	1.8652335	1.4762553
8.045	1.6635304	1.6778516	1.4115301
8.548	1.4738938	1.5146000	1.3498385
9.050	1.3123802	1.3719665	1.2911152
9.553	1.1744591	1.2469995	1.2352768
10.056	1.0564597	1.1372223	1.1822230
10.559	0.9552435	1.0405815	1.1318438
11.062	0.8678702	0.9553118	1.0840162
11.564	0.7916867	0.8799203	1.0386162
12.067	0.7247115	0.8131621	0.9955128
12.570	0.6656136	0.7539992	0.9545826
13.073	0.6133717	0.7015082	0.9157060
13.575	0.5671372	0.6548344	0.8787669
14.078	0.5261589	0.6131845	0.8436531
14.581	0.4897713	0.5758452	0.8102612
15.084	0.4573685	0.5421880	0.7784919
15.587	0.4284156	0.5116799	0.7482533
16.089	0.4024546	0.4838759	0.7194561
16.592	0.3791106	0.4584142	0.6920172
17.095	0.3580797	0.4350074	0.6658563
17.598	0.3390984	0.4134233	0.6408967
18.101	0.3219238	0.3934649	0.6170661
18.603	0.3063315	0.3749676	0.5942979
19.106	0.2921108	0.3577962	0.5725290
19.609	0.2790790	0.3418459	0.5517014
20.112	0.2670859	0.3270332	0.5317612
20.615	0.2560059	0.3132861	0.5126585
21.117	0.2457283	0.3005344	0.4943483
21.620	0.2361502	0.2887051	0.4767887
22.123	0.2271852	0.2777234	0.4599431
22.626	0.2187674	0.2675105	0.4437778
23.129	0.2108255	0.2579826	0.4282622
23.631	0.2032809	0.2490542	0.4133682
24.134	0.1960726	0.2406416	0.3990707
24.637	0.1891791	0.2326701	0.3853457
25.140	0.1826320	0.2250803	0.3721698
25.643	0.1765031	0.2178269	0.3595210
26.145	0.1708563	0.2108791	0.3473779
26.648	0.1656994	0.2042160	0.3357190
27.151	0.1610018	0.1978233	0.3245242
27.654	0.1567191	0.1916904	0.3137715
28.156	0.1527810	0.1858112	0.3034422
28.659	0.1490759	0.1801829	0.2935148
29.162	0.1454491	0.1748031	0.2839701
29.665	0.1417548	0.1696685	0.2747891
30.168	0.1379628	0.1647720	0.2659534
30.670	0.1341347	0.1601003	0.2574462
31.173	0.1303388	0.1556366	0.2492506
31.676	0.1266272	0.1513620	0.2413514
32.179	0.1230347	0.1472570	0.2337334
32.682	0.1195746	0.1433057	0.2263833
33.184	0.1162518	0.1394949	0.2192884
33.687	0.1130681	0.1358117	0.2124380
34.190	0.1100239	0.1322456	0.2058225
34.693	0.1071182	0.1287893	0.1994339
35.196	0.1043470	0.1254351	0.1932646
35.698	0.1016990	0.1221761	0.1873075
36.201	0.0991590	0.1190074	0.1815561
36.704	0.0967144	0.1159246	0.1760041
37.207	0.0943576	0.1129244	0.1706448
37.710	0.0920809	0.1100031	0.1654719
38.212	0.0898701	0.1071560	0.1604792
38.715	0.0877062	0.1043791	0.1556599
39.218	0.0855638	0.1016707	0.1510074
39.721	0.0834263	0.0990324	0.1465149
40.224	0.0812977	0.0964698	0.1421759
40.726	0.0791964	0.0939892	0.1379843
41.229	0.0771426	0.0915949	0.1339345
41.732	0.0751515	0.0892873	0.1300211
42.235	0.0732309	0.0870624	0.1262391
42.737	0.0713782	0.0849140	0.1225837
43.240	0.0695847	0.0828360	0.1190498
43.743	0.0678394	0.0808217	0.1156329
44.246	0.0661321	0.0788639	0.1123284
44.749	0.0644563	0.0769561	0.1091324
45.251	0.0628184	0.0750921	0.1060411
45.754	0.0612313	0.0732700	0.1030509
46.257	0.0597032	0.0714926	0.1001588
46.760	0.0582193	0.0697657	0.0973611
47.263	0.0567268	0.0680963	0.0946546
47.765	0.0551720	0.0664877	0.0920357
48.268	0.0535473	0.0649387	0.0895015
48.771	0.0518855	0.0634438	0.0870492
49.274	0.0502384	0.0619952	0.0846758
49.777	0.0486550	0.0605855	0.0823793
50.279	0.0471693	0.0592088	0.0801574
50.782	0.0457995	0.0578594	0.0780087
51.285	0.0445526	0.0565324	0.0759320
51.788	0.0434272	0.0552242	0.0739262
52.291	0.0423980	0.0539350	0.0719906
52.793	0.0414270	0.0526703	0.0701240
53.296	0.0404886	0.0514377	0.0683248
53.799	0.0395683	0.0502446	0.0665911
54.302	0.0386558	0.0490958	0.0649202
54.805	0.0377422	0.0479924	0.0633093
55.307	0.0368216	0.0469321	0.0617550
55.810	0.0358994	0.0459126	0.0602544
56.313	0.0349900	0.0449313	0.0588041
56.816	0.0341071	0.0439842	0.0574011
57.319	0.0332519	0.0430644	0.0560425
57.821	0.0324212	0.0421640	0.0547256
58.324	0.0316113	0.0412755	0.0534479
58.827	0.0308187	0.0403935	0.0522074
59.330	0.0300405	0.0395156	0.0510017
59.832	0.0292867	0.0386416	0.0498287
60.335	0.0285747	0.0377723	0.0486862
60.838	0.0279120	0.0369091	0.0475717
61.341	0.0272972	0.0360544	0.0464827
61.844	0.0267258	0.0352113	0.0454167
62.346	0.0261873	0.0343836	0.0443712
62.849	0.0256613	0.0335756	0.0433436
63.352	0.0251239	0.0327908	0.0423317
63.855	0.0245668	0.0320304	0.0413333
64.358	0.0240031	0.0312935	0.0403469
64.860	0.0234532	0.0305775	0.0393718
65.363	0.0229307	0.0298807	0.0384086
65.866	0.0224432	0.0292010	0.0374586
66.369	0.0219901	0.0285357	0.0365241
66.872	0.0215608	0.0278816	0.0356082
67.374	0.0211379	0.0272349	0.0347144
67.877	0.0207045	0.0265960	0.0338462
68.380	0.0202507	0.0259712	0.0330068
68.883	0.0197757	0.0253714	0.0321992
69.386	0.0192857	0.0248071	0.0314253
69.888	0.0187895	0.0242849	0.0306863
70.391	0.0182947	0.0238073	0.0299825
70.894	0.0178025	0.0233739	0.0293132
71.397	0.0173091	0.0229821	0.0286773
71.900	0.0168093	0.0226250	0.0280727
72.402	0.0162964	0.0222909	0.0274973
72.905	0.0157611	0.0219645	0.0269485
73.408	0.0151964	0.0216332	0.0264239
73.911	0.0145955	0.0212894	0.0259210
74.413	0.0139538	0.0209287	0.0254376
74.916	0.0132671	0.0205487	0.0249710
75.419	0.0125331	0.0201498	0.0245186
75.922	0.0117500	0.0197372	0.0240772
76.425	0.0109216	0.0193196	0.0236439
76.927	0.0100554	0.0189047	0.0232162
77.430	0.0091831	0.0184958	0.0227925
77.933	0.0083848	0.0180918	0.0223725
78.436	0.0077858	0.0176907	0.0219569
78.939	0.0074642	0.0172911	0.0215470
79.441	0.0073746	0.0168834	0.0211446
79.944	0.0074242	0.0164521	0.0207510
80.447	0.0075384	0.0159879	0.0203674
80.950	0.0076685	0.0154942	0.0199948
81.453	0.0077865	0.0149845	0.0196337
81.955	0.0078787	0.0144758	0.0192843
82.458	0.0079457	0.0139829	0.0189466
82.961	0.0079926	0.0135185	0.0186202
83.464	0.0080226	0.0131017	0.0183049
83.967	0.0080350	0.0127594	0.0180002
84.469	0.0080251	0.0125141	0.0177056
84.972	0.0079876	0.0123725	0.0174206
85.475	0.0079211	0.0123248	0.0171448
85.978	0.0078278	0.0123462	0.0168774
86.481	0.0077119	0.0124051	0.0166179
86.983	0.0075797	0.0124705	0.0163658
87.486	0.0074389	0.0125165	0.0161206
87.989	0.0072949	0.0125264	0.0158819
88.492	0.0071502	0.0124921	0.0156495
88.995	0.0070067	0.0124142	0.0154231
89.497	0.0068659	0.0122995	0.0152024
90.000	0.0067266	0.0121590	0.0149871
90.503	0.0065840	0.0120029	0.0147768
91.006	0.0064299	0.0118329	0.0145710
91.508	0.0062551	0.0116413	0.0143693
92.011	0.0060562	0.0114149	0.0141711
92.514	0.0058417	0.0111427	0.0139762
93.017	0.0056258	0.0108218	0.0137844
93.520	0.0054210	0.0104573	0.0135960
94.022	0.0052347	0.0100621	0.0134113
94.525	0.0050685	0.0096554	0.0132308
95.028	0.0049202	0.0092618	0.0130553
95.531	0.0047882	0.0089062	0.0128854
96.034	0.0046704	0.0086067	0.0127216
96.536	0.0045624	0.0083706	0.0125644
97.039	0.0044589	0.0081945	0.0124141
97.542	0.0043546	0.0080679	0.0122710
98.045	0.0042449	0.0079775	0.0121351
98.548	0.0041271	0.0079090	0.0120064
99.050	0.0040027	0.0078489	0.0118847
99.553	0.0038747	0.0077859	0.0117697
100.056	0.0037453	0.0077124	0.0116608
100.559	0.0036155	0.0076247	0.0115572
101.062	0.0034854	0.0075210	0.0114580
101.564	0.0033556	0.0074005	0.0113618
102.067	0.0032276	0.0072632	0.0112675
102.570	0.0031048	0.0071103	0.0111737
103.073	0.0029901	0.0069449	0.0110793
103.576	0.0028860	0.0067708	0.0109834
104.078	0.0027943	0.0065927	0.0108857
104.581	0.0027158	0.0064165	0.0107862
105.084	0.0026503	0.0062499	0.0106856
105.587	0.0025975	0.0061030	0.0105845
106.089	0.0025575	0.0059872	0.0104838
106.592	0.0025301	0.0059132	0.0103844
107.095	0.0025147	0.0058894	0.0102869
107.598	0.0025107	0.0059184	0.0101920
108.101	0.0025183	0.0059947	0.0101002
108.603	0.0025402	0.0061023	0.0100120
109.106	0.0025812	0.0062172	0.0099279
109.609	0.0026451	0.0063147	0.0098480
110.112	0.0027331	0.0063797	0.0097727
110.615	0.0028425	0.0064105	0.0097019
111.117	0.0029667	0.0064132	0.0096359
111.620	0.0030934	0.0063954	0.0095745
112.123	0.0032040	0.0063635	0.0095175
112.626	0.0032736	0.0063224	0.0094649
113.129	0.0032822	0.0062739	0.0094162
113.631	0.0032328	0.0062172	0.0093712
114.134	0.0031479	0.0061492	0.0093299
114.637	0.0030483	0.0060667	0.0092921
115.140	0.0029463	0.0059686	0.0092582
115.643	0.0028488	0.0058570	0.0092282
116.145	0.0027590	0.0057354	0.0092025
116.648	0.0026803	0.0056082	0.0091812
117.151	0.0026141	0.0054810	0.0091646
117.654	0.0025590	0.0053594	0.0091525
118.157	0.0025119	0.0052479	0.0091448
118.659	0.0024684	0.0051482	0.0091413
119.162	0.0024240	0.0050598	0.0091415
119.665	0.0023749	0.0049808	0.0091451
120.168	0.0023185	0.0049079	0.0091518
120.670	0.0022542	0.0048373	0.0091611
121.173	0.0021840	0.0047654	0.0091728
121.676	0.0021130	0.0046901	0.0091867
122.179	0.0020468	0.0046110	0.0092028
122.682	0.0019883	0.0045289	0.0092209
123.184	0.0019379	0.0044458	0.0092413
123.687	0.0018941	0.0043643	0.0092640
124.190	0.0018552	0.0042871	0.0092895
124.693	0.0018197	0.0042170	0.0093180
125.196	0.0017874	0.0041562	0.0093500
125.698	0.0017590	0.0041058	0.0093858
126.201	0.0017346	0.0040660	0.0094258
126.704	0.0017138	0.0040366	0.0094702
127.207	0.0016960	0.0040173	0.0095193
127.710	0.0016818	0.0040079	0.0095732
128.212	0.0016736	0.0040086	0.0096322
128.715	0.0016726	0.0040192	0.0096962
129.218	0.0016776	0.0040391	0.0097651
129.721	0.0016882	0.0040667	0.0098386
130.224	0.0017051	0.0041000	0.0099163
130.726	0.0017287	0.0041368	0.0099977
131.229	0.0017587	0.0041753	0.0100825
131.732	0.0017963	0.0042138	0.0101704
132.235	0.0018419	0.0042515	0.0102610
132.738	0.0018937	0.0042877	0.0103545
133.240	0.0019475	0.0043222	0.0104509
133.743	0.0019965	0.0043553	0.0105506
134.246	0.0020330	0.0043875	0.0106539
134.749	0.0020543	0.0044192	0.0107615
135.252	0.0020637	0.0044504	0.0108739
135.754	0.0020655	0.0044808	0.0109920
136.257	0.0020629	0.0045101	0.0111162
136.760	0.0020582	0.0045379	0.0112473
137.263	0.0020525	0.0045642	0.0113857
137.765	0.0020457	0.0045896	0.0115318
138.268	0.0020368	0.0046149	0.0116856
138.771	0.0020249	0.0046410	0.0118473
139.274	0.0020101	0.0046685	0.0120165
139.777	0.0019934	0.0046977	0.0121930
140.279	0.0019759	0.0047292	0.0123764
140.782	0.0019581	0.0047639	0.0125665
141.285	0.0019402	0.0048032	0.0127632
141.788	0.0019224	0.0048484	0.0129666
142.291	0.0019042	0.0049003	0.0131771
142.793	0.0018850	0.0049596	0.0133953
143.296	0.0018651	0.0050262	0.0136221
143.799	0.0018440	0.0050996	0.0138585
144.302	0.0018203	0.0051786	0.0141055
144.805	0.0017936	0.0052615	0.0143638
145.307	0.0017646	0.0053467	0.0146339
145.810	0.0017344	0.0054331	0.0149161
146.313	0.0017057	0.0055213	0.0152102
146.816	0.0016836	0.0056127	0.0155158
147.319	0.0016723	0.0057094	0.0158323
147.821	0.0016738	0.0058136	0.0161591
148.324	0.0016880	0.0059267	0.0164952
148.827	0.0017132	0.0060498	0.0168398
149.330	0.0017461	0.0061841	0.0171919
149.833	0.0017827	0.0063306	0.0175501
150.335	0.0018187	0.0064902	0.0179131
150.838	0.0018499	0.0066637	0.0182795
151.341	0.0018735	0.0068517	0.0186480
151.844	0.0018876	0.0070554	0.0190176
152.346	0.0018920	0.0072766	0.0193875
152.849	0.0018894	0.0075176	0.0197577
153.352	0.0018846	0.0077807	0.0201284
153.855	0.0018802	0.0080675	0.0204999
154.358	0.0018763	0.0083790	0.0208726
154.860	0.0018716	0.0087147	0.0212462
155.363	0.0018646	0.0090726	0.0216202
155.866	0.0018552	0.0094484	0.0219933
156.369	0.0018458	0.0098352	0.0223636
156.872	0.0018408	0.0102244	0.0227285
157.374	0.0018434	0.0106074	0.0230849
157.877	0.0018548	0.0109763	0.0234292
158.380	0.0018752	0.0113251	0.0237578
158.883	0.0019049	0.0116505	0.0240671
159.386	0.0019425	0.0119527	0.0243534
159.888	0.0019859	0.0122338	0.0246134
160.391	0.0020329	0.0124965	0.0248437
160.894	0.0020818	0.0127437	0.0250413
161.397	0.0021313	0.0129745	0.0252032
161.900	0.0021806	0.0131851	0.0253267
162.402	0.0022288	0.0133748	0.0254092
162.905	0.0022763	0.0135501	0.0254483
163.408	0.0023233	0.0137218	0.0254420
163.911	0.0023687	0.0138982	0.0253891
164.414	0.0024113	0.0140798	0.0252897
164.916	0.0024520	0.0142571	0.0251451
165.419	0.0024926	0.0144103	0.0249585
165.922	0.0025365	0.0145118	0.0247343
166.425	0.0025890	0.0145340	0.0244781
166.927	0.0026563	0.0144621	0.0241971
167.430	0.0027421	0.0143065	0.0238998
167.933	0.0028467	0.0141056	0.0235962
168.436	0.0029674	0.0139144	0.0232973
168.939	0.0030980	0.0137920	0.0230149
169.441	0.0032265	0.0137938	0.0227603
169.944	0.0033397	0.0139688	0.0225451
170.447	0.0034345	0.0143544	0.0223805
170.950	0.0035196	0.0149672	0.0222772
171.453	0.0036066	0.0158022	0.0222445
171.955	0.0037032	0.0168372	0.0222897
172.458	0.0038132	0.0180378	0.0224177
172.961	0.0039417	0.0193603	0.0226307
173.464	0.0040960	0.0207510	0.0229293
173.967	0.0042838	0.0221463	0.0233126
174.469	0.0045130	0.0234750	0.0237775
174.972	0.0047937	0.0246845	0.0243176
175.475	0.0051331	0.0257785	0.0249228
175.978	0.0055335	0.0268047	0.0255790
176.481	0.0060010	0.0278264	0.0262700
176.983	0.0065492	0.0289059	0.0269770
177.486	0.0071896	0.0300824	0.0276776
177.989	0.0079138	0.0313588	0.0283426
178.492	0.0086799	0.0326656	0.0289335
178.995	0.0094010	0.0338717	0.0294046
179.497	0.0099421	0.0347942	0.0297103
180.000	0.0101488	0.0351567	0.0298165