Angle   0.646 um	0.855 um	2.119 um	

0.000	26.3908100	15.0556726	3.1267297
0.503	24.6050377	14.4601574	3.1083717
1.006	20.7308254	12.9938002	3.0551622
1.508	16.8168449	11.2534266	2.9722829
2.011	13.5162106	9.6063137	2.8670113
2.514	10.8668451	8.1571980	2.7471755
3.017	8.7791510	6.9195199	2.6198266
3.520	7.1419339	5.8800359	2.4904404
4.022	5.8563428	5.0133982	2.3626819
4.525	4.8425908	4.2940688	2.2387252
5.028	4.0382786	3.6979358	2.1197221
5.531	3.3954835	3.2030871	2.0062246
6.034	2.8777173	2.7903223	1.8985330
6.536	2.4572396	2.4434767	1.7967583
7.039	2.1131258	2.1502693	1.7008879
7.542	1.8295965	1.9012363	1.6107903
8.045	1.5944710	1.6888818	1.5262398
8.548	1.3983223	1.5071440	1.4469635
9.050	1.2338802	1.3509822	1.3726729
9.553	1.0955836	1.2162641	1.3030881
10.056	0.9791175	1.0996197	1.2379248
10.559	0.8808507	0.9983348	1.1769055
11.062	0.7972843	0.9101081	1.1197537
11.564	0.7251423	0.8330233	1.0661966
12.067	0.6621448	0.7655522	1.0159738
12.570	0.6069381	0.7064667	0.9688459
13.073	0.5585036	0.6546915	0.9245889
13.575	0.5159844	0.6092227	0.8829922
14.078	0.4786068	0.5691221	0.8438615
14.581	0.4456780	0.5335482	0.8070208
15.084	0.4165595	0.5017692	0.7723058
15.587	0.3906851	0.4731757	0.7395679
16.089	0.3675824	0.4472641	0.7086688
16.592	0.3468804	0.4236386	0.6794786
17.095	0.3282975	0.4019974	0.6518742
17.598	0.3115909	0.3821031	0.6257395
18.101	0.2965303	0.3637536	0.6009671
18.603	0.2829011	0.3467778	0.5774581
19.106	0.2704940	0.3310407	0.5551232
19.609	0.2591310	0.3164451	0.5338789
20.112	0.2486756	0.3029213	0.5136496
20.615	0.2390153	0.2904110	0.4943669
21.117	0.2300523	0.2788542	0.4759683
21.620	0.2216863	0.2681840	0.4583994
22.123	0.2138362	0.2583301	0.4416115
22.626	0.2064510	0.2492140	0.4255623
23.129	0.1994577	0.2407471	0.4102133
23.631	0.1927598	0.2328365	0.3955311
24.134	0.1862807	0.2253869	0.3814851
24.637	0.1799979	0.2183148	0.3680477
25.140	0.1739712	0.2115575	0.3551915
25.643	0.1683259	0.2050711	0.3428907
26.145	0.1631761	0.1988297	0.3311202
26.648	0.1585331	0.1928205	0.3198556
27.151	0.1543564	0.1870345	0.3090725
27.654	0.1506041	0.1814661	0.2987471
28.156	0.1472067	0.1761153	0.2888559
28.659	0.1440367	0.1709851	0.2793748
29.162	0.1408849	0.1660784	0.2702803
29.665	0.1375368	0.1613984	0.2615508
30.168	0.1339728	0.1569412	0.2531648
30.670	0.1303127	0.1526926	0.2451030
31.173	0.1266643	0.1486338	0.2373465
31.676	0.1230968	0.1447427	0.2298773
32.179	0.1196546	0.1409964	0.2226790
32.682	0.1163456	0.1373790	0.2157352
33.184	0.1131704	0.1338791	0.2090327
33.687	0.1101285	0.1304835	0.2025598
34.190	0.1072206	0.1271838	0.1963076
34.693	0.1044476	0.1239755	0.1902686
35.196	0.1018068	0.1208519	0.1844365
35.698	0.0992829	0.1178077	0.1788053
36.201	0.0968554	0.1148394	0.1733695
36.704	0.0945105	0.1119440	0.1681236
37.207	0.0922453	0.1091208	0.1630617
37.710	0.0900575	0.1063667	0.1581782
38.212	0.0879337	0.1036754	0.1534672
38.715	0.0858529	0.1010419	0.1489219
39.218	0.0837783	0.0984639	0.1445354
39.721	0.0816852	0.0959436	0.1403007
40.224	0.0795822	0.0934913	0.1362109
40.726	0.0774988	0.0911182	0.1322596
41.229	0.0754647	0.0888316	0.1284414
41.732	0.0734999	0.0866332	0.1247509
42.235	0.0716159	0.0845176	0.1211835
42.737	0.0698071	0.0824763	0.1177342
43.240	0.0680609	0.0805029	0.1143983
43.743	0.0663619	0.0785894	0.1111708
44.246	0.0646962	0.0767271	0.1080474
44.749	0.0630538	0.0749079	0.1050238
45.251	0.0614484	0.0731226	0.1020971
45.754	0.0599048	0.0713686	0.0992643
46.257	0.0584451	0.0696512	0.0965224
46.760	0.0570566	0.0679809	0.0938684
47.263	0.0556551	0.0663694	0.0912990
47.765	0.0541504	0.0648231	0.0888107
48.268	0.0525312	0.0633406	0.0864005
48.771	0.0508466	0.0619148	0.0840657
49.274	0.0491702	0.0605343	0.0818038
49.777	0.0475665	0.0591897	0.0796127
50.279	0.0460756	0.0578748	0.0774908
50.782	0.0447154	0.0565824	0.0754370
51.285	0.0434924	0.0553061	0.0734512
51.788	0.0424099	0.0540401	0.0715334
52.291	0.0414324	0.0527840	0.0696840
52.793	0.0405042	0.0515465	0.0679030
53.296	0.0395953	0.0503395	0.0661895
53.799	0.0386937	0.0491736	0.0645415
54.302	0.0377907	0.0480562	0.0629562
54.805	0.0368769	0.0469878	0.0614302
55.307	0.0359436	0.0459646	0.0599598
55.810	0.0349992	0.0449835	0.0585414
56.313	0.0340672	0.0440427	0.0571713
56.816	0.0331694	0.0431385	0.0558461
57.319	0.0323050	0.0422626	0.0545626
57.821	0.0314670	0.0414044	0.0533181
58.324	0.0306493	0.0405540	0.0521104
58.827	0.0298448	0.0397051	0.0509375
59.330	0.0290445	0.0388558	0.0497975
59.832	0.0282624	0.0380070	0.0486885
60.335	0.0275274	0.0371600	0.0476082
60.838	0.0268502	0.0363166	0.0465540
61.341	0.0262281	0.0354798	0.0455231
61.844	0.0256582	0.0346530	0.0445125
62.346	0.0251298	0.0338405	0.0435191
62.849	0.0246156	0.0330485	0.0425398
63.352	0.0240785	0.0322814	0.0415711
63.855	0.0235061	0.0315408	0.0406098
64.358	0.0229206	0.0308248	0.0396536
64.860	0.0223542	0.0301292	0.0387014
65.363	0.0218252	0.0294519	0.0377537
65.866	0.0213447	0.0287907	0.0368126
66.369	0.0209138	0.0281423	0.0358819
66.872	0.0205186	0.0275011	0.0349661
67.374	0.0201352	0.0268597	0.0340707
67.877	0.0197405	0.0262162	0.0332010
68.380	0.0193221	0.0255795	0.0323620
68.883	0.0188803	0.0249655	0.0315581
69.386	0.0184255	0.0243898	0.0307923
69.888	0.0179712	0.0238612	0.0300661
70.391	0.0175288	0.0233824	0.0293799
70.894	0.0170999	0.0229535	0.0287328
71.397	0.0166790	0.0225726	0.0281229
71.900	0.0162600	0.0222327	0.0275473
72.402	0.0158352	0.0219188	0.0270027
72.905	0.0153916	0.0216099	0.0264860
73.408	0.0149207	0.0212895	0.0259938
73.911	0.0144125	0.0209503	0.0255234
74.413	0.0138595	0.0205886	0.0250724
74.916	0.0132529	0.0202017	0.0246379
75.419	0.0125849	0.0197902	0.0242163
75.922	0.0118442	0.0193620	0.0238035
76.425	0.0110256	0.0189311	0.0233948
76.927	0.0101197	0.0185098	0.0229867
77.430	0.0091492	0.0181027	0.0225769
77.933	0.0082188	0.0177064	0.0221654
78.436	0.0075319	0.0173189	0.0217540
78.939	0.0072250	0.0169416	0.0213453
79.441	0.0072120	0.0165606	0.0209425
79.944	0.0073435	0.0161481	0.0205482
80.447	0.0075182	0.0156867	0.0201642
80.950	0.0076796	0.0151799	0.0197921
81.453	0.0078012	0.0146469	0.0194324
81.955	0.0078733	0.0141100	0.0190856
82.458	0.0079057	0.0135842	0.0187513
82.961	0.0079124	0.0130788	0.0184293
83.464	0.0079021	0.0126152	0.0181190
83.967	0.0078761	0.0122336	0.0178197
84.469	0.0078289	0.0119687	0.0175309
84.972	0.0077532	0.0118322	0.0172520
85.475	0.0076480	0.0118113	0.0169823
85.978	0.0075170	0.0118722	0.0167210
86.481	0.0073649	0.0119723	0.0164674
86.983	0.0071996	0.0120717	0.0162207
87.486	0.0070310	0.0121388	0.0159805
87.989	0.0068660	0.0121548	0.0157464
88.492	0.0067063	0.0121134	0.0155183
88.995	0.0065544	0.0120192	0.0152960
89.497	0.0064129	0.0118849	0.0150792
90.000	0.0062814	0.0117298	0.0148676
90.503	0.0061535	0.0115720	0.0146608
91.006	0.0060172	0.0114154	0.0144581
91.508	0.0058562	0.0112469	0.0142586
92.011	0.0056628	0.0110442	0.0140617
92.514	0.0054487	0.0107877	0.0138667
93.017	0.0052340	0.0104708	0.0136736
93.520	0.0050348	0.0100984	0.0134825
94.022	0.0048603	0.0096847	0.0132941
94.525	0.0047103	0.0092533	0.0131093
95.028	0.0045804	0.0088359	0.0129293
95.531	0.0044685	0.0084659	0.0127549
96.034	0.0043731	0.0081674	0.0125871
96.536	0.0042887	0.0079483	0.0124265
97.039	0.0042087	0.0078012	0.0122736
97.542	0.0041267	0.0077102	0.0121288
98.045	0.0040368	0.0076573	0.0119923
98.548	0.0039356	0.0076245	0.0118641
99.050	0.0038258	0.0075953	0.0117442
99.553	0.0037127	0.0075566	0.0116323
100.056	0.0035988	0.0075010	0.0115277
100.559	0.0034848	0.0074261	0.0114294
101.062	0.0033699	0.0073320	0.0113362
101.564	0.0032533	0.0072181	0.0112463
102.067	0.0031362	0.0070839	0.0111580
102.570	0.0030222	0.0069304	0.0110694
103.073	0.0029145	0.0067603	0.0109785
103.576	0.0028153	0.0065774	0.0108841
104.078	0.0027266	0.0063864	0.0107857
104.581	0.0026492	0.0061928	0.0106836
105.084	0.0025822	0.0060055	0.0105787
105.587	0.0025254	0.0058372	0.0104724
106.089	0.0024793	0.0057029	0.0103661
106.592	0.0024438	0.0056183	0.0102609
107.095	0.0024176	0.0055964	0.0101577
107.598	0.0023998	0.0056431	0.0100575
108.101	0.0023904	0.0057525	0.0099607
108.603	0.0023934	0.0059025	0.0098681
109.106	0.0024170	0.0060562	0.0097800
109.609	0.0024686	0.0061754	0.0096968
110.112	0.0025519	0.0062398	0.0096187
110.615	0.0026661	0.0062532	0.0095459
111.117	0.0028059	0.0062309	0.0094785
111.620	0.0029573	0.0061873	0.0094164
112.123	0.0030958	0.0061333	0.0093593
112.626	0.0031829	0.0060765	0.0093069
113.129	0.0031832	0.0060192	0.0092586
113.631	0.0031034	0.0059590	0.0092141
114.134	0.0029837	0.0058896	0.0091731
114.637	0.0028557	0.0058041	0.0091358
115.140	0.0027344	0.0056998	0.0091023
115.643	0.0026257	0.0055793	0.0090730
116.145	0.0025311	0.0054470	0.0090485
116.648	0.0024541	0.0053083	0.0090290
117.151	0.0023958	0.0051704	0.0090149
117.654	0.0023536	0.0050418	0.0090060
118.157	0.0023226	0.0049288	0.0090020
118.659	0.0022968	0.0048332	0.0090026
119.162	0.0022700	0.0047539	0.0090071
119.665	0.0022370	0.0046875	0.0090149
120.168	0.0021943	0.0046288	0.0090255
120.670	0.0021406	0.0045719	0.0090383
121.173	0.0020780	0.0045116	0.0090529
121.676	0.0020142	0.0044449	0.0090692
122.179	0.0019569	0.0043708	0.0090869
122.682	0.0019099	0.0042909	0.0091061
123.184	0.0018723	0.0042081	0.0091269
123.687	0.0018418	0.0041259	0.0091497
124.190	0.0018156	0.0040479	0.0091749
124.693	0.0017913	0.0039779	0.0092031
125.196	0.0017686	0.0039188	0.0092350
125.698	0.0017483	0.0038718	0.0092710
126.201	0.0017303	0.0038365	0.0093118
126.704	0.0017132	0.0038118	0.0093578
127.207	0.0016955	0.0037972	0.0094092
127.710	0.0016782	0.0037921	0.0094664
128.212	0.0016664	0.0037970	0.0095298
128.715	0.0016630	0.0038122	0.0095995
129.218	0.0016654	0.0038369	0.0096753
129.721	0.0016726	0.0038694	0.0097568
130.224	0.0016862	0.0039071	0.0098434
130.726	0.0017066	0.0039471	0.0099343
131.229	0.0017334	0.0039873	0.0100288
131.732	0.0017688	0.0040260	0.0101265
132.235	0.0018146	0.0040626	0.0102270
132.738	0.0018690	0.0040966	0.0103302
133.240	0.0019272	0.0041279	0.0104361
133.743	0.0019802	0.0041573	0.0105452
134.246	0.0020161	0.0041860	0.0106580
134.749	0.0020319	0.0042146	0.0107752
135.252	0.0020339	0.0042432	0.0108979
135.754	0.0020289	0.0042713	0.0110268
136.257	0.0020210	0.0042978	0.0111630
136.760	0.0020128	0.0043220	0.0113073
137.263	0.0020056	0.0043438	0.0114606
137.765	0.0019985	0.0043638	0.0116234
138.268	0.0019898	0.0043832	0.0117960
138.771	0.0019779	0.0044033	0.0119783
139.274	0.0019630	0.0044246	0.0121701
139.777	0.0019464	0.0044472	0.0123707
140.279	0.0019299	0.0044716	0.0125797
140.782	0.0019134	0.0044989	0.0127965
141.285	0.0018975	0.0045308	0.0130210
141.788	0.0018823	0.0045691	0.0132533
142.291	0.0018669	0.0046152	0.0134940
142.793	0.0018505	0.0046697	0.0137440
143.296	0.0018340	0.0047329	0.0140048
143.799	0.0018170	0.0048042	0.0142780
144.302	0.0017966	0.0048820	0.0145651
144.805	0.0017717	0.0049639	0.0148674
145.307	0.0017434	0.0050472	0.0151857
145.810	0.0017120	0.0051306	0.0155203
146.313	0.0016805	0.0052145	0.0158710
146.816	0.0016558	0.0053013	0.0162372
147.319	0.0016437	0.0053941	0.0166181
147.821	0.0016463	0.0054955	0.0170132
148.324	0.0016631	0.0056069	0.0174213
148.827	0.0016918	0.0057295	0.0178416
149.330	0.0017286	0.0058644	0.0182727
149.833	0.0017687	0.0060128	0.0187133
150.335	0.0018073	0.0061757	0.0191615
150.838	0.0018396	0.0063537	0.0196155
151.341	0.0018624	0.0065476	0.0200732
151.844	0.0018737	0.0067588	0.0205335
152.346	0.0018729	0.0069899	0.0209957
152.849	0.0018645	0.0072442	0.0214600
153.352	0.0018558	0.0075250	0.0219274
153.855	0.0018504	0.0078355	0.0223993
154.358	0.0018475	0.0081774	0.0228765
154.860	0.0018443	0.0085516	0.0233595
155.363	0.0018380	0.0089569	0.0238478
155.866	0.0018274	0.0093892	0.0243398
156.369	0.0018153	0.0098410	0.0248330
156.872	0.0018080	0.0103018	0.0253239
157.374	0.0018095	0.0107612	0.0258077
157.877	0.0018204	0.0112100	0.0262795
158.380	0.0018406	0.0116405	0.0267341
158.883	0.0018705	0.0120490	0.0271664
159.386	0.0019091	0.0124369	0.0275715
159.888	0.0019531	0.0128076	0.0279450
160.391	0.0020003	0.0131655	0.0282823
160.894	0.0020491	0.0135145	0.0285793
161.397	0.0020984	0.0138515	0.0288319
161.900	0.0021477	0.0141664	0.0290362
162.402	0.0021960	0.0144543	0.0291881
162.905	0.0022441	0.0147242	0.0292835
163.408	0.0022927	0.0149938	0.0293184
163.911	0.0023395	0.0152770	0.0292898
164.414	0.0023818	0.0155752	0.0291964
164.916	0.0024201	0.0158761	0.0290391
165.419	0.0024562	0.0161510	0.0288211
165.922	0.0024931	0.0163565	0.0285474
166.425	0.0025379	0.0164468	0.0282244
166.927	0.0025992	0.0163925	0.0278603
167.430	0.0026822	0.0162038	0.0274656
167.933	0.0027869	0.0159333	0.0270532
168.436	0.0029103	0.0156556	0.0266373
168.939	0.0030452	0.0154479	0.0262329
169.441	0.0031754	0.0153804	0.0258547
169.944	0.0032804	0.0155175	0.0255170
170.447	0.0033567	0.0159109	0.0252345
170.950	0.0034195	0.0165823	0.0250217
171.453	0.0034854	0.0175229	0.0248916
171.955	0.0035630	0.0187012	0.0248545
172.458	0.0036537	0.0200723	0.0249163
172.961	0.0037610	0.0215814	0.0250804
173.464	0.0038931	0.0231580	0.0253487
173.967	0.0040585	0.0247141	0.0257226
174.469	0.0042654	0.0261379	0.0262020
174.972	0.0045282	0.0273410	0.0267826
175.475	0.0048568	0.0283364	0.0274539
175.978	0.0052521	0.0292077	0.0282011
176.481	0.0057239	0.0300596	0.0290072
176.983	0.0062987	0.0309984	0.0298551
177.486	0.0070061	0.0320999	0.0307238
177.989	0.0078496	0.0334028	0.0315793
178.492	0.0087880	0.0348339	0.0323680
178.995	0.0097145	0.0362402	0.0330171
179.497	0.0104415	0.0374132	0.0334479
180.000	0.0107285	0.0379065	0.0335993